The Slurry Chemical Dispense Unit is a low cost solution to dispensing slurry directly to the Fab. It is usually fitted with a centrifugal pump and other mixing pumps to blend and dispense the slurry chemicals. Our slurry dispense platform can be used for any CMP application, and is designed to maintain the health of the slurry.

The system design and component selection involves meticulous engineering to provide a high order of efficiency and reliability. The use of VFD controller enables input speed of the pumps to be controlled by feedback pressure in the loop efficiently and automatically, ensuring that the dispense pressure is always maintained to support the high demands of Chemical Mechanical Planarization process tools at any given time.